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MEMS

MEMS Sensors

Technology Overview

SMIC's MEMS solutions currently focus on two mainstream technology platforms. The first platform is a MEMS Microphone with an "open" device that has already entered mass production. The second platform is a CMOS-MEMS integrated with a"sealed"device, an Inertial sensor, which started production in 2Q16.

Process Modules

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    上海配资 Sisonic

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    Accelerometer

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    Pressure Sensor

  • Microscope

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    RF Devices

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